The glow discharge optical emission spectrometry allows for qualitative and semi-quantitative surface analysis of surface and bulk with 2-5 nm depth resolution. Sputtering provides depth profiling of metallic and organic coatings, conversion layers or thin films.
The technique allows the analysis of conductive as well as non-conductive samples. Spot size varies between 2-4 mm.
OCAS’s GD-OES is equipped with: