The new dual-beam system is equipped with state-of-the-art STEM, EDS and BSE detectors. The dual-beam systems incorporate focused ion beam (FIB) and scanning electron microscope (SEM). The FIB is mainly used for site-specific material removal and SEM enables non-destructive imaging. These systems are multi-functional and can be used for sample preparation, microscopy applications and micro-machining.
Transmission electron microscopy (TEM) and atom probe tomography (APT) sample preparation are two important FIB/SEM applications. High-resolution SEM and STEM images with precise milling allow us to prepare high-quality site-specific samples. The microscopy applications of the FIB/SEM dual-beam can provide analytical information without the need for an additional technique. The main examples of microscopy applications are cross-sectioning and FIB/SEM tomography. In these cases, the EDS detector, incorporated into our dual-beam, allows obtaining compositional information both in 2D and 3D.