Equipment & Infrastructure

Focussed ion beam

Triple beam focused ion beam with high resolution SEM and EDX, combining high resolution imaging system with specific sample preparation techniques to study surfaces, interfaces and cross sections. Sample damage during processing is reduced by the triple beam concept, where the Ar-beam allows for low energy final milling and sample cleaning e.g for TEM sample preparation.

Typical applications

  • Nano-machining
  • Direct imaging and analysis
  • 3D-reconstruction “slice and view” on ┬Ám scale by consecutive milling and imaging.