SEM (FEG) Field emission gun scanning electron microscope
OCAS’s FEG-SEM is equipped with both an Energy dispersive X-ray (EDS) spectrometer as well as an Wavelength dispersive X-ray (WDS) spectrometer and an Electron Back Scatter Diffraction (EBSD) detector. The instrument is therefore applicable for:
- High-magnification observations possible with several different modes as GB (gentle beam), TTL (through the lens), SHL (super hybrid lens), LDF (long depth focus)
- In-depth microstructure characterisation of multi-phase steels
- Orientation imaging by EBSD (electron back scatter diffraction) characterisation
- Prior austenitic microstructure reconstruction
- Element distribution information (EDS as well as WDS) by spot analysis, line scan, X-ray map